S-parameters of Parylene C microwave microfluidic devices
Broadband S-parameter measurements of Parylene C microwave microfluidic devices from 100 MHz - 110 GHz. The Parylene C devices consisted of 400 nm platinum coplanar waveguides (CPW) (50 um center conductor, 5 um gaps, 200 um ground planes) deposited on fused silica with 6.5 um of Parylene C on top, capped with a PDMS …