Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness
SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip.  The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports values and uncertainties for the entire lot of chips for sale; however, this dataset provides the raw data used to certify the SRM. …